Over 10 years of research at the Lightwave Devices Group of the MESA+ Research Institute has resulted in worldwide-recognized competence in integrated optics in general and in SiON/SiN technology in particular. LioniX has acquired intellectual property rights on this technology. In close cooperation with the Lightwave Devices Group, LioniX has succeeded to control important SiON/SiN layer properties (e.g. thickness and refractive index uniformity, material birefringence, stress etc.), so that LioniX can provide its customers with cutting-edge integrated optics technology for both sensor and telecom applications.